Apparatus and method of manufacturing silicon seed rod

A manufacturing apparatus of silicon seed rod in which two silicon seed rods are joined into one long silicon seed rod by welding, having: an upper seed rod holding part holding an upper silicon seed rod vertically; an elevating device holding a lower silicon seed rod which faces a lower end of the...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: NAGAURA AKIMICHI, NAKANO MAMORU
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A manufacturing apparatus of silicon seed rod in which two silicon seed rods are joined into one long silicon seed rod by welding, having: an upper seed rod holding part holding an upper silicon seed rod vertically; an elevating device holding a lower silicon seed rod which faces a lower end of the upper silicon seed rod in a state in which the lower silicon seed rod is movable vertically; an induction-heating coil being arranged around the lower end of the upper silicon seed rod; a preheating ring being disposed below the induction-heating coil; and a moving device of the preheating ring that moves the preheating ring between a heat position in which the preheating ring is induction-heated around an upper end of the lower silicon seed rod by the induction-heating coil and a wait position which is distant from the heat position.