Process control for a sonication cleaning tank

A disk is placed into a sonication cleaning tank containing a liquid. A first flow rate and a first sonication power are applied to the liquid to clean the disk. An opacity count is generated indicative of contaminants and/or bubbles in the liquid. Based at least in part on the opacity count, a seco...

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Bibliographische Detailangaben
Hauptverfasser:	CHANG BING-SHIUAN, CHO JOHN, CHEN SHAUN H, CHEN CHAOYUAN, LUND RHOWNICA A, TRIVEDI ATUL K
Format:	Patent
Sprache:	eng
Schlagworte:	CLEANING CLEANING IN GENERAL PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL TRANSPORTING
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	A disk is placed into a sonication cleaning tank containing a liquid. A first flow rate and a first sonication power are applied to the liquid to clean the disk. An opacity count is generated indicative of contaminants and/or bubbles in the liquid. Based at least in part on the opacity count, a second flow rate and a second sonication power are then applied to the liquid.