Integrated circuit inductor with integrated vias

Integrated circuit inductors (5) are formed by interconnecting various metal layers (10) in an integrated circuit with continuous vias (200). Using continuous vias (200) improves the Q factor over existing methods for high frequency applications. The contiguous length of the continuous vias should b...

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Bibliographische Detailangaben
Hauptverfasser: PITTS ROBERT L, BALDWIN GREG C
Format: Patent
Sprache:eng
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Zusammenfassung:Integrated circuit inductors (5) are formed by interconnecting various metal layers (10) in an integrated circuit with continuous vias (200). Using continuous vias (200) improves the Q factor over existing methods for high frequency applications. The contiguous length of the continuous vias should be greater than three percent of the length of the inductor (5).