Semiconductor and solar wafers

A silicon-on-insulator or bonded wafer includes an upper portion having a trapezoid shape in cross-section and a lower portion having an outer peripheral edge having a curved shape.

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Bibliographische Detailangaben
Hauptverfasser: ZHANG GUOQIANG DAVID, VANDAMME ROLAND R
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A silicon-on-insulator or bonded wafer includes an upper portion having a trapezoid shape in cross-section and a lower portion having an outer peripheral edge having a curved shape.