Rotary vacuum pump, vacuum device, and pump connection structure
A rotary vacuum pump includes a pump casing on which an intake port flange is formed, a rotor which has a rotating side evacuating device and is driven to rotate at high speed inside the pump casing, and a fixing side evacuating device which is provided inside the pump casing and generates an evacua...
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Sprache: | eng |
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Zusammenfassung: | A rotary vacuum pump includes a pump casing on which an intake port flange is formed, a rotor which has a rotating side evacuating device and is driven to rotate at high speed inside the pump casing, and a fixing side evacuating device which is provided inside the pump casing and generates an evacuating effect together with the rotating side evacuating device. The intake port flange is fastened to a device subject to evacuating by a bolt. A through-hole is formed in the intake port flange for inserting the bolt and has a diameter larger than that of the bolt. A gap forming device for forming a gap between the bolt and the through-hole in the intake port flange is provided on a matching surface of the through-hole. |
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