Method and system for measuring laser induced phenomena changes in a semiconductor device

Method and system for measuring laser induced phenomena changes in a semiconductor device

A method and system for measuring laser induced phenomena changes of at least one of a resistance, a capacitance and an inductance in a semiconductor device. The method comprises applying a biasing voltage from an emitter-follower circuit to a device under test (DUT); inducing said changes in the DU...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: TAN SOON HUAT, KOH LIAN SER, PHANG CHEE HONG JACOB, CHUA CHOON MENG, CHUA WAH PHENG
Format: Patent
Sprache:eng
Schlagworte:
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:A method and system for measuring laser induced phenomena changes of at least one of a resistance, a capacitance and an inductance in a semiconductor device. The method comprises applying a biasing voltage from an emitter-follower circuit to a device under test (DUT); inducing said changes in the DUT; and measuring a voltage change in a collector portion of the emitter-follower circuit as a measure for said changes.