Mirror arrangement of a laser processing system
A mirror arrangement for a laser processing system includes a mirror configured to deflect laser radiation incident on the mirror arrangement onto a workpiece. The mirror arrangement includes first, second, and third mirror regions. A surface of the third mirror region is parallel to or recessed fro...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A mirror arrangement for a laser processing system includes a mirror configured to deflect laser radiation incident on the mirror arrangement onto a workpiece. The mirror arrangement includes first, second, and third mirror regions. A surface of the third mirror region is parallel to or recessed from a direction of propagation of the laser radiation incident on the mirror arrangement such that the third mirror region forms a shadow zone. |
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