Inspection system and method
A manufacturing method and system are disclosed for illuminating a target. A light controller has a plurality of pixels, and light is projected from at least a first light source to the light controller, wherein the light from the first light source is incident on the light controller at a first ang...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A manufacturing method and system are disclosed for illuminating a target. A light controller has a plurality of pixels, and light is projected from at least a first light source to the light controller, wherein the light from the first light source is incident on the light controller at a first angle. The pixels are controlled to establish illumination characteristics for first and second optical paths between the light controller and the target. |
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