Self-aligned stylus with high-sphericity and method of manufacturing the same

A method of manufacturing a self-aligned stylus with high sphericity includes the steps of: forming a polymeric layer on a substrate; placing a sphere on the polymeric layer; softening the polymeric layer to make a portion of the sphere sink into the polymeric layer; forming a specific light absorbi...

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Bibliographische Detailangaben
Hauptverfasser: SHIH PO-JEN, SHIH WEN-PIN, WU MING-DAO, CHANG DUO-RU, TSAO LII, TSAI YAOUAN
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A method of manufacturing a self-aligned stylus with high sphericity includes the steps of: forming a polymeric layer on a substrate; placing a sphere on the polymeric layer; softening the polymeric layer to make a portion of the sphere sink into the polymeric layer; forming a specific light absorbing layer on the polymeric layer; illuminating the sphere and the specific light absorbing layer with specific light such that the specific light is focused by the sphere to expose the polymeric layer to form an exposed portion and an unexposed portion; removing the specific light absorbing layer; and baking the polymeric layer and then removing the unexposed portion. A self-aligned stylus with high sphericity is also disclosed.