Aluminum oxide sintered body, method for producing the same and member for semiconductor producing apparatus
An aluminum oxide sintered body is provided, including europium and nitrogen, and plate-like crystals having peaks coinciding with EuAl12O19 in an X-ray diffraction profile are dispersed over a whole sintered body. Such an aluminum oxide sintered body can be obtained by forming a mixed powder contai...
Gespeichert in:
| Hauptverfasser: | , |
|---|---|
| Format: | Patent |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| Zusammenfassung: | An aluminum oxide sintered body is provided, including europium and nitrogen, and plate-like crystals having peaks coinciding with EuAl12O19 in an X-ray diffraction profile are dispersed over a whole sintered body. Such an aluminum oxide sintered body can be obtained by forming a mixed powder containing an alumina powder, a europium compound powder and an aluminum nitride powder into a green body having a predetermined shape, and sintering the green body under a non-oxidizing atmosphere. |
|---|