Magnetic field generating apparatus and plasma processing apparatus

A magnetic field generating apparatus which generates a cusped magnetic field on an electrode includes a magnet mechanism which is attached to the electrode and includes a plurality of magnets held on a holding plate, and a rotation mechanism which rotates the holding plate. The plurality of magnets...

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Bibliographische Detailangaben
Hauptverfasser: IORI KAZUYUKI, SAGO YASUMI, IKEDA MASAYOSHI
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A magnetic field generating apparatus which generates a cusped magnetic field on an electrode includes a magnet mechanism which is attached to the electrode and includes a plurality of magnets held on a holding plate, and a rotation mechanism which rotates the holding plate. The plurality of magnets (61) are regularly arrayed to be point-symmetrical about a specific point. The specific point is at a position shifted from the center of rotation of the holding plate by the rotation mechanism.