FinFET with two independent gates and method for fabricating the same

A FinFET (100) comprises a fin-shaped layer-section (116) of a single-crystalline active semiconductor layer (104) extending on an insulating substrate layer (106) along a longitudinal fin direction between, a source layer-section (122), and a drain layer-section (124) of the single-crystalline acti...

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Bibliographische Detailangaben
Hauptverfasser: CORONEL PHILIPPE, MULLER MARKUS GERHARD ANDREAS
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A FinFET (100) comprises a fin-shaped layer-section (116) of a single-crystalline active semiconductor layer (104) extending on an insulating substrate layer (106) along a longitudinal fin direction between, a source layer-section (122), and a drain layer-section (124) of the single-crystalline active semiconductor layer (104). Furthermore, two separate gate-electrode layers (138.1, 138.2) are provided, which do not form sections of the single-crystalline active semiconductor layer, each of the gate-electrode layers facing one of the opposite side faces of the fin-shaped layer-section (116). Each gate-electrode layer is connected with a respective separate gate contact (154, 156). The gate-electrode layers, as seen in a cross-sectional view of a plane that is perpendicular to the longitudinal fin-direction, are arranged on the substrate layer (106) between the respective side face of the fin-shaped layer section and a respective contact-post layer section (118, 120) of the single-crystalline semiconductor layer (104).