Fluidized bed reactor for production of high purity silicon

Fluidized bed reactor for production of high purity silicon

Methods and apparatus for the production of high purity silicon including a fluidized bed reactor with one or more protective layers deposited on an inside surface of the fluidized bed reactor. The protective layer may be resistant to corrosion by fluidizing gases and silicon-bearing gases.

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Bibliographische Detailangaben
Hauptverfasser: REL XAVIER BENAVIDES, BARONA JOSE LUIS MONTESINOS, MARTINEZ MARIA TOMAS, CANLE MANUEL VICENTE VALES, CONEJERO EVARISTO AYUSO, GARCIA PEDRO-TOMAS LUJAN, SANCHEZ JAVIER SAN SEGUNDO
Format: Patent
Sprache:eng
Schlagworte:
CHEMISTRY
COMPOUNDS THEREOF
INORGANIC CHEMISTRY
METALLURGY
NON-METALLIC ELEMENTS
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Beschreibung
Zusammenfassung:Methods and apparatus for the production of high purity silicon including a fluidized bed reactor with one or more protective layers deposited on an inside surface of the fluidized bed reactor. The protective layer may be resistant to corrosion by fluidizing gases and silicon-bearing gases.