Integrated large XY rotary positioning table with virtual center of rotation

A unique X, Y, (Rotary) positioning system is disclosed that may include a machine base assembly with a substrate slide moving on the machine base with either a recirculating or air bearing in Y direction and two integrated cross stages attached to the slide which can kinetically provide large movem...

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Bibliographische Detailangaben
1. Verfasser:	EIDELBERG BOAZ
Format:	Patent
Sprache:	eng
Schlagworte:	CABINETS COFFEE MILLS COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT DESKS DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING DOMESTIC ARTICLES OR APPLIANCES DRAWERS FURNITURE GENERAL DETAILS OF FURNITURE HUMAN NECESSITIES MACHINE TOOLS MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS METAL-WORKING NOT OTHERWISE PROVIDED FOR OFFICE FURNITURE PERFORMING OPERATIONS SPICE MILLS SUCTION CLEANERS IN GENERAL TABLES TRANSPORTING
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Beschreibung
Zusammenfassung:	A unique X, Y, (Rotary) positioning system is disclosed that may include a machine base assembly with a substrate slide moving on the machine base with either a recirculating or air bearing in Y direction and two integrated cross stages attached to the slide which can kinetically provide large movements of the slide relative to the base in the X direction as well as generating large motion of the slide in the rotary direction about a virtual center of rotation. The positioning system allows a user to position large format glass substrates and the like with precision control. Specifically, depending on the mounting configuration of the present invention, a user may correct for straightness in X, X′ and Y directions, yaw in the A rotation direction and position in the X, X′ and Y direction.