Capacitive pressure sensor

A pressure sensor includes a platform and an elastic measuring membrane, which is joined with a surface of the platform to form a measuring chamber sealed closed at the edge, wherein the platform and/or the measuring membrane comprise ceramic, glass or a single crystal material, the measuring membra...

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Bibliographische Detailangaben
Hauptverfasser:	SCHMIDT ELKE, KRETSCHMAR CHRISTEL, ROSSBERG ANDREAS, DREWES ULFERT, STOLLE SABINE, HENTSCHE MELANIE, HEGNER FRANK
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CURRENT COLLECTORS ELECTRICITY GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS LINE CONNECTORS MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION TECHNICAL SUBJECTS COVERED BY FORMER USPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TESTING
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Beschreibung
Zusammenfassung:	A pressure sensor includes a platform and an elastic measuring membrane, which is joined with a surface of the platform to form a measuring chamber sealed closed at the edge, wherein the platform and/or the measuring membrane comprise ceramic, glass or a single crystal material, the measuring membrane has at least a first electrode, which faces the surface of the platform, the surface of the platform has at least a second electrode, which faces that of the measuring membrane. The capacitance between the first electrode and the second electrode is a measure for the pressure to be measured; wherein additionally at least one of the first and second electrodes comprises a conductive layer, which contains metal and glass, and wherein the metal comprises at least two noble metal elements.