Method for positioning an object by an electromagnetic motor, stage apparatus and lithographic apparatus

A method for positioning an object by an electromagnetic motor which, in use, produces a plurality of primary forces and a pitch torque associated with the primary forces. The method includes a cycle which includes: determining the desired forces and torques for positioning the object, determining t...

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Bibliographische Detailangaben
Hauptverfasser:	MATTAAR THOMAS AUGUSTUS, COX HENRIKUS HERMAN MARIE
Format:	Patent
Sprache:	eng
Schlagworte:	ACCESSORIES THEREFOR APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USINGWAVES OTHER THAN OPTICAL WAVES APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FORPROJECTING OR VIEWING THEM CINEMATOGRAPHY CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORSOR DYNAMO-ELECTRIC CONVERTERS CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS CONVERSION OR DISTRIBUTION OF ELECTRIC POWER ELECTRICITY ELECTROGRAPHY GENERATION HOLOGRAPHY PHOTOGRAPHY PHYSICS
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Beschreibung
Zusammenfassung:	A method for positioning an object by an electromagnetic motor which, in use, produces a plurality of primary forces and a pitch torque associated with the primary forces. The method includes a cycle which includes: determining the desired forces and torques for positioning the object, determining the primary forces to be generated by the motor, determine the pitch torque from either the primary forces or from the desired forces and torques, determine the desired signals for the motor to generate the primary forces. In a next cycle, prior to the determination of the primary forces, the desired forces and torques for positioning the object are modified using the pitch torque determined in the previous cycle of steps.