Interferometric system for the use of special-purpose optical systems
An interferometric system which includes an illumination arm having a light source and an illumination optical system for forming an illumination beam path; an object arm having a special-purpose optical system for measuring an object for the purpose of forming an imaging beam path; a reference arm...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | An interferometric system which includes an illumination arm having a light source and an illumination optical system for forming an illumination beam path; an object arm having a special-purpose optical system for measuring an object for the purpose of forming an imaging beam path; a reference arm having an adjusting element and a reference element coupled thereto; a detector arm having a detector; and a beam splitter, an at least partially transparent dispersion-compensating medium being provided in the reference arm for compensating the dispersion of the optical components of the object arm, the dispersion-compensating medium being exchangeable and also being adjusted to the special-purpose optical system. This enables a universal white light interferometer platform to be provided for enabling different measuring tasks to be carried out simply by exchanging the special-purpose optical systems. |
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