Multiaxial gyroscope

The present invention relates to a multiaxial gyroscope, which comprises a vibration-sensing device, a plurality of elastic connecting parts, a first substrate, and a plurality of electrodes. The first ends of the elastic connecting parts are adapted on the periphery of the vibration-sensing device....

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LO YUAN, CHIU CHUI-KUNN, KU SHENG JING, TSENG CHIH WEI, HO KYEYN
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The present invention relates to a multiaxial gyroscope, which comprises a vibration-sensing device, a plurality of elastic connecting parts, a first substrate, and a plurality of electrodes. The first ends of the elastic connecting parts are adapted on the periphery of the vibration-sensing device. The sidewall of the first substrate connects with the second ends of the elastic connecting parts. The plurality of electrodes is located on the periphery of the vibration-sensing device and is opposite to the plurality of elastic connecting parts. The vibration-sensing device comprises a ring and a plurality of vibration blocks. By means of the vibration blocks, the sensing area as well as the driving amplitude of the gyroscope can be increased effectively. Thereby, the intensity of the sensed signals of the gyroscope can be enhanced.