Apparatus for calibrating optical scanner, method of manufacturing the same, and method of calibrating optical scanner using the same
A method of manufacturing a calibration apparatus for an optical scanner. The method includes reacting a substrate coated with a functional group and a molecule capable of forming an activated excimer to immobilize the molecule on the substrate.
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | A method of manufacturing a calibration apparatus for an optical scanner. The method includes reacting a substrate coated with a functional group and a molecule capable of forming an activated excimer to immobilize the molecule on the substrate. |
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