Apparatus for calibrating optical scanner, method of manufacturing the same, and method of calibrating optical scanner using the same

A method of manufacturing a calibration apparatus for an optical scanner. The method includes reacting a substrate coated with a functional group and a molecule capable of forming an activated excimer to immobilize the molecule on the substrate.

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Bibliographische Detailangaben
Hauptverfasser: SHIM JEO-YOUNG, YOO KYU-TAE, MA JANG-SEOK, JUNG SUNG-OUK, NAMGOONG JIN-NA
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A method of manufacturing a calibration apparatus for an optical scanner. The method includes reacting a substrate coated with a functional group and a molecule capable of forming an activated excimer to immobilize the molecule on the substrate.