Multi-degree-of micro-actuator

The present invention provides a multi-dimensional micro-actuator comprising a stator having a plurality of symmetrically arranged electrode piezoelectric plates, a rotator disposed near the stator, and a plurality of contacting elements. Each of the symmetrically arranged electrode piezoelectric pl...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: SHEN SHENGIH, HUANG JIUNNG, LI TAING
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The present invention provides a multi-dimensional micro-actuator comprising a stator having a plurality of symmetrically arranged electrode piezoelectric plates, a rotator disposed near the stator, and a plurality of contacting elements. Each of the symmetrically arranged electrode piezoelectric plates comprises a piezoelectric plate, a first electrode, and a second electrode. The first and second electrodes are symmetrically arranged on a first surface of the piezoelectric plate. A second surface of the piezoelectric plate is coupled to the ground. The contacting elements are disposed on the electrode piezoelectric plates for rotation of the rotator.