Multi-degree-of micro-actuator
The present invention provides a multi-dimensional micro-actuator comprising a stator having a plurality of symmetrically arranged electrode piezoelectric plates, a rotator disposed near the stator, and a plurality of contacting elements. Each of the symmetrically arranged electrode piezoelectric pl...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | The present invention provides a multi-dimensional micro-actuator comprising a stator having a plurality of symmetrically arranged electrode piezoelectric plates, a rotator disposed near the stator, and a plurality of contacting elements. Each of the symmetrically arranged electrode piezoelectric plates comprises a piezoelectric plate, a first electrode, and a second electrode. The first and second electrodes are symmetrically arranged on a first surface of the piezoelectric plate. A second surface of the piezoelectric plate is coupled to the ground. The contacting elements are disposed on the electrode piezoelectric plates for rotation of the rotator. |
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