Method of producing polishing pad

The present invention relates to a method of producing a polishing pad, comprising steps of: (a) providing a base material comprising a plurality of fibers; said base material having a surface for polishing a substrate, wherein the fibers comprise a core and a cladding surrounding the core, and the...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YAO I-PENG, FENG CHUNGIH, HUNG YUNGANG
Format:	Patent
Sprache:	eng
Schlagworte:	GRINDING PERFORMING OPERATIONS POLISHING TOOLS FOR GRINDING, BUFFING, OR SHARPENING TRANSPORTING
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