Capacitative pressure sensor

A capacitative pressure sensor that has a silicon substrate, CMOS layers deposited on the silicon substrate, a conductive layer deposited on the CMOS layer and, a passivation layer on the conductive layer. A conductive membrane extends from the substrate assembly such that it is spaced from the cond...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	MALLINSON SAMUEL GEORGE, SILVERBROOK KIA
Format:	Patent
Sprache:	eng
Schlagworte:	DEVICES OR ARRANGEMENTS RELATED TO TYRES MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PERFORMING OPERATIONS PHYSICS REPAIRING, OR CONNECTING VALVES TO, INFLATABLE ELASTIC BODIESIN GENERAL TESTING TRANSPORTING TYRE CHANGING OR REPAIRING TYRE INFLATION VEHICLE TYRES VEHICLES IN GENERAL
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Beschreibung
Zusammenfassung:	A capacitative pressure sensor that has a silicon substrate, CMOS layers deposited on the silicon substrate, a conductive layer deposited on the CMOS layer and, a passivation layer on the conductive layer. A conductive membrane extends from the substrate assembly such that it is spaced from the conductive layer. The conductive layer has a plurality of apertures and the silicon substrate to define a passage for fluid communication with fluid pressure exterior to the pressure sensor and a cap extending from the substrate assembly to cover the membrane and form a chamber on one side of the conductive membrane that is sealed from the fluid pressure exterior to the pressure sensor.