Metal interconnect and IC chip including metal interconnect

A metal interconnect and an IC chip including the metal interconnect are disclosed. One embodiment of the method may include providing an integrated circuit (IC) chip up to and including a middle of line (MOL) layer, the MOL layer including a contact positioned within a first dielectric; recessing t...

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Bibliographische Detailangaben
Hauptverfasser: BARTH KARL W, KEI RAMONA, KUMAR KAUSHIK A, PETRARCA KEVIN S, SIDDIQUI SHAHAB
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A metal interconnect and an IC chip including the metal interconnect are disclosed. One embodiment of the method may include providing an integrated circuit (IC) chip up to and including a middle of line (MOL) layer, the MOL layer including a contact positioned within a first dielectric; recessing the first dielectric such that the contact extends beyond an upper surface of the first dielectric; forming a second dielectric over the first dielectric such that the second dielectric surrounds at least a portion of the contact, the second dielectric having a lower dielectric constant than the first dielectric; forming a planarizing layer over the second dielectric; forming an opening through the planarizing layer and into the second dielectric to the contact; and forming a metal in the opening to form the metal interconnect.