Wafer aligning apparatus and related method
Embodiments of the invention provide a wafer aligning apparatus and a wafer aligning method. In one embodiment, the wafer aligning apparatus comprises an imaging unit adapted to take an image of a wafer being transferred from a load lock chamber to a transfer chamber and adapted to convert the image...
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| creator | LEE HEOK-JAE PARK HYU-RIM KIM SANG-HO SEO KEE-WEONE WOO CHANG-WOO BAE DO-IN |
| description | Embodiments of the invention provide a wafer aligning apparatus and a wafer aligning method. In one embodiment, the wafer aligning apparatus comprises an imaging unit adapted to take an image of a wafer being transferred from a load lock chamber to a transfer chamber and adapted to convert the image into digital signals, and a signal processing unit adapted to calculate a center alignment correction value for the wafer by comparing the digital signals to a master image stored in the signal processing unit. The wafer aligning apparatus further comprises a robot controller adapted to receive the center alignment correction value from the signal processing unit and adapted to control a transfer robot in accordance with the center alignment correction value to provide the wafer to a process chamber such that the center of the wafer is substantially aligned. |
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In one embodiment, the wafer aligning apparatus comprises an imaging unit adapted to take an image of a wafer being transferred from a load lock chamber to a transfer chamber and adapted to convert the image into digital signals, and a signal processing unit adapted to calculate a center alignment correction value for the wafer by comparing the digital signals to a master image stored in the signal processing unit. 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In one embodiment, the wafer aligning apparatus comprises an imaging unit adapted to take an image of a wafer being transferred from a load lock chamber to a transfer chamber and adapted to convert the image into digital signals, and a signal processing unit adapted to calculate a center alignment correction value for the wafer by comparing the digital signals to a master image stored in the signal processing unit. The wafer aligning apparatus further comprises a robot controller adapted to receive the center alignment correction value from the signal processing unit and adapted to control a transfer robot in accordance with the center alignment correction value to provide the wafer to a process chamber such that the center of the wafer is substantially aligned.</description><subject>CALCULATING</subject><subject>COMPUTING</subject><subject>COUNTING</subject><subject>ELECTRIC COMMUNICATION TECHNIQUE</subject><subject>ELECTRICITY</subject><subject>HANDLING RECORD CARRIERS</subject><subject>PHYSICS</subject><subject>PICTORIAL COMMUNICATION, e.g. TELEVISION</subject><subject>PRESENTATION OF DATA</subject><subject>RECOGNITION OF DATA</subject><subject>RECORD CARRIERS</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2010</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZNAOT0xLLVJIzMlMz8vMS1dILChILEosKS1WSMxLUShKzUksSU1RyE0tychP4WFgTUvMKU7lhdLcDApuriHOHrqpBfnxqcUFicmpeakl8aHB5haGxqYmRk5GxkQoAQAQxikk</recordid><startdate>20101012</startdate><enddate>20101012</enddate><creator>LEE HEOK-JAE</creator><creator>PARK HYU-RIM</creator><creator>KIM SANG-HO</creator><creator>SEO KEE-WEONE</creator><creator>WOO CHANG-WOO</creator><creator>BAE DO-IN</creator><scope>EVB</scope></search><sort><creationdate>20101012</creationdate><title>Wafer aligning apparatus and related method</title><author>LEE HEOK-JAE ; PARK HYU-RIM ; KIM SANG-HO ; SEO KEE-WEONE ; WOO CHANG-WOO ; BAE DO-IN</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US7813542B23</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2010</creationdate><topic>CALCULATING</topic><topic>COMPUTING</topic><topic>COUNTING</topic><topic>ELECTRIC COMMUNICATION TECHNIQUE</topic><topic>ELECTRICITY</topic><topic>HANDLING RECORD CARRIERS</topic><topic>PHYSICS</topic><topic>PICTORIAL COMMUNICATION, e.g. TELEVISION</topic><topic>PRESENTATION OF DATA</topic><topic>RECOGNITION OF DATA</topic><topic>RECORD CARRIERS</topic><toplevel>online_resources</toplevel><creatorcontrib>LEE HEOK-JAE</creatorcontrib><creatorcontrib>PARK HYU-RIM</creatorcontrib><creatorcontrib>KIM SANG-HO</creatorcontrib><creatorcontrib>SEO KEE-WEONE</creatorcontrib><creatorcontrib>WOO CHANG-WOO</creatorcontrib><creatorcontrib>BAE DO-IN</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>LEE HEOK-JAE</au><au>PARK HYU-RIM</au><au>KIM SANG-HO</au><au>SEO KEE-WEONE</au><au>WOO CHANG-WOO</au><au>BAE DO-IN</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Wafer aligning apparatus and related method</title><date>2010-10-12</date><risdate>2010</risdate><abstract>Embodiments of the invention provide a wafer aligning apparatus and a wafer aligning method. In one embodiment, the wafer aligning apparatus comprises an imaging unit adapted to take an image of a wafer being transferred from a load lock chamber to a transfer chamber and adapted to convert the image into digital signals, and a signal processing unit adapted to calculate a center alignment correction value for the wafer by comparing the digital signals to a master image stored in the signal processing unit. The wafer aligning apparatus further comprises a robot controller adapted to receive the center alignment correction value from the signal processing unit and adapted to control a transfer robot in accordance with the center alignment correction value to provide the wafer to a process chamber such that the center of the wafer is substantially aligned.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | CALCULATING COMPUTING COUNTING ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY HANDLING RECORD CARRIERS PHYSICS PICTORIAL COMMUNICATION, e.g. TELEVISION PRESENTATION OF DATA RECOGNITION OF DATA RECORD CARRIERS |
| title | Wafer aligning apparatus and related method |
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