System, method and apparatus for performing metrology on patterned media disks with test pattern areas
Techniques for performing metrology on magnetic media disk formations that are arranged in curvilinear patterns are disclosed. Small integrated test patterns having rectangular or hexagonal periodicity are integrated among the concentric circles of patterned media formations. The test patterns cover...
Gespeichert in:
1. Verfasser: | |
---|---|
Format: | Patent |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | Techniques for performing metrology on magnetic media disk formations that are arranged in curvilinear patterns are disclosed. Small integrated test patterns having rectangular or hexagonal periodicity are integrated among the concentric circles of patterned media formations. The test patterns cover only very small areas of the disk so as to not significantly affect disk capacity. The periodicity of the test patterns allows their formations to be more readily measured by metrology technology than those having a curvilinear periodicity. |
---|