Edge inspection apparatus
An edge inspection apparatus includes: an illumination means 5 that illuminates an edge of a flat subject with diffused light from a position other than directly above or directly below a surface or a reverse surface of the subject; an imaging means 4 that takes an image of the edge from a position...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | An edge inspection apparatus includes: an illumination means 5 that illuminates an edge of a flat subject with diffused light from a position other than directly above or directly below a surface or a reverse surface of the subject; an imaging means 4 that takes an image of the edge from a position in a direction perpendicular to a plane parallel to the surface or the reverse surface of the subject at the same time; and an inspection means 7 that inspects conditions of a portion of the edge, which is inclined with respect to the surface or the reverse surface using the image obtained by the imaging means. |
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