Method for the recovery and re-use of process gases

The present invention relates to methods and systems for processing an exhaust stream containing a recyclable component mixed with other components and impurities to produce a high purity product that contains all of the recyclable component. One or more waste streams containing none of the recyclab...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser:	WHITLOCK WALTER H
Format:	Patent
Sprache:	eng
Schlagworte:	BLASTING COMBINED HEATING AND REFRIGERATION SYSTEMS GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS HEAT PUMP SYSTEMS HEATING LIGHTING LIQUEFACTION SOLIDIFICATION OF GASES LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS MANUFACTURE OR STORAGE OF ICE MECHANICAL ENGINEERING MIXTURES BY PRESSURE AND COLD TREATMENT PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL REFRIGERATION OR COOLING SEPARATION TECHNICAL SUBJECTS COVERED BY FORMER USPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ARTCOLLECTIONS [XRACs] AND DIGESTS TRANSPORTING WEAPONS
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Beschreibung
Zusammenfassung:	The present invention relates to methods and systems for processing an exhaust stream containing a recyclable component mixed with other components and impurities to produce a high purity product that contains all of the recyclable component. One or more waste streams containing none of the recyclable component are also produced. The present invention particularly relates to the recovery of valuable recyclable components used in the manufacture of semiconductor devices.