Methods and systems for analyzing process equipment processing variations using sensor data
The present invention is generally directed to various methods and systems for isolating process equipment using sensor data. In one illustrative embodiment, the method includes providing at least two processing tools wherein the tools produce different process results when performing a target proce...
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| creator | COSS, JR. ELFIDO |
| description | The present invention is generally directed to various methods and systems for isolating process equipment using sensor data. In one illustrative embodiment, the method includes providing at least two processing tools wherein the tools produce different process results when performing a target process operation, acquiring support facility data using a plurality of sensors, and analyzing the acquired support facility data to determine a cause for the processing tools producing different process results. |
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In one illustrative embodiment, the method includes providing at least two processing tools wherein the tools produce different process results when performing a target process operation, acquiring support facility data using a plurality of sensors, and analyzing the acquired support facility data to determine a cause for the processing tools producing different process results.</description><language>eng</language><subject>CALCULATING ; COMPUTING ; CONTROL OR REGULATING SYSTEMS IN GENERAL ; CONTROLLING ; COUNTING ; ELECTRIC DIGITAL DATA PROCESSING ; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS ; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS ; PHYSICS ; REGULATING</subject><creationdate>2010</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20100824&DB=EPODOC&CC=US&NR=7783455B1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76289</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20100824&DB=EPODOC&CC=US&NR=7783455B1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>COSS, JR. ELFIDO</creatorcontrib><title>Methods and systems for analyzing process equipment processing variations using sensor data</title><description>The present invention is generally directed to various methods and systems for isolating process equipment using sensor data. In one illustrative embodiment, the method includes providing at least two processing tools wherein the tools produce different process results when performing a target process operation, acquiring support facility data using a plurality of sensors, and analyzing the acquired support facility data to determine a cause for the processing tools producing different process results.</description><subject>CALCULATING</subject><subject>COMPUTING</subject><subject>CONTROL OR REGULATING SYSTEMS IN GENERAL</subject><subject>CONTROLLING</subject><subject>COUNTING</subject><subject>ELECTRIC DIGITAL DATA PROCESSING</subject><subject>FUNCTIONAL ELEMENTS OF SUCH SYSTEMS</subject><subject>MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS</subject><subject>PHYSICS</subject><subject>REGULATING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2010</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZIj2TS3JyE8pVkjMS1EoriwuSc0tVkjLLwLyE3MqqzLz0hUKivKTU4uLFVILSzMLclPzSmAiIMmyxKLMxJLM_LxihVKwQHFqXjFQe0piSSIPA2taYk5xKi-U5mZQcHMNcfbQTS3Ij08tLkhMTs1LLYkPDTY3tzA2MTV1MjQmQgkAiew8YQ</recordid><startdate>20100824</startdate><enddate>20100824</enddate><creator>COSS, JR. ELFIDO</creator><scope>EVB</scope></search><sort><creationdate>20100824</creationdate><title>Methods and systems for analyzing process equipment processing variations using sensor data</title><author>COSS, JR. ELFIDO</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US7783455B13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2010</creationdate><topic>CALCULATING</topic><topic>COMPUTING</topic><topic>CONTROL OR REGULATING SYSTEMS IN GENERAL</topic><topic>CONTROLLING</topic><topic>COUNTING</topic><topic>ELECTRIC DIGITAL DATA PROCESSING</topic><topic>FUNCTIONAL ELEMENTS OF SUCH SYSTEMS</topic><topic>MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS</topic><topic>PHYSICS</topic><topic>REGULATING</topic><toplevel>online_resources</toplevel><creatorcontrib>COSS, JR. ELFIDO</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>COSS, JR. ELFIDO</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Methods and systems for analyzing process equipment processing variations using sensor data</title><date>2010-08-24</date><risdate>2010</risdate><abstract>The present invention is generally directed to various methods and systems for isolating process equipment using sensor data. In one illustrative embodiment, the method includes providing at least two processing tools wherein the tools produce different process results when performing a target process operation, acquiring support facility data using a plurality of sensors, and analyzing the acquired support facility data to determine a cause for the processing tools producing different process results.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | CALCULATING COMPUTING CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING COUNTING ELECTRIC DIGITAL DATA PROCESSING FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PHYSICS REGULATING |
| title | Methods and systems for analyzing process equipment processing variations using sensor data |
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