Methods and systems for analyzing process equipment processing variations using sensor data
The present invention is generally directed to various methods and systems for isolating process equipment using sensor data. In one illustrative embodiment, the method includes providing at least two processing tools wherein the tools produce different process results when performing a target proce...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | The present invention is generally directed to various methods and systems for isolating process equipment using sensor data. In one illustrative embodiment, the method includes providing at least two processing tools wherein the tools produce different process results when performing a target process operation, acquiring support facility data using a plurality of sensors, and analyzing the acquired support facility data to determine a cause for the processing tools producing different process results. |
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