Apparatus and method for investigating a sample

Apparatus and method for investigating a sample

An apparatus for investigating a sample comprising: a source of beam radiation; a detector for detecting a beam of radiation reflected by the sample and an optical subsystem for manipulating the beam between source and detector wherein the optical subsystem comprises a first optical element arranged...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: CLUFF JULIAN A
Format: Patent
Sprache:eng
Schlagworte:
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:An apparatus for investigating a sample comprising: a source of beam radiation; a detector for detecting a beam of radiation reflected by the sample and an optical subsystem for manipulating the beam between source and detector wherein the optical subsystem comprises a first optical element arranged in use to angularly deflect the source beam within a given solid angle and a second optical element arranged to focus the beam from the first optical element onto a substantially flat image plane and wherein radiation reflected by the sample passes back through the first and second optical elements to the detector.