Ampoule for liquid draw and vapor draw with a continuous level sensor

Ampoule for liquid draw and vapor draw with a continuous level sensor

A method and apparatus for providing a precursor to a process chamber is described. The apparatus comprises an ampoule capable of receiving either a liquid precursor source material or a solid precursor source material. The ampoule is capable of delivering either a liquid precursor material to a vap...

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Bibliographische Detailangaben
Hauptverfasser: NARWANKAR PRAVIN K, NGO KHAI, KHER SHREYAS S, CHHABRA PAUL, CHOI KENRIC T, NGUYEN SON T, WU DIEN-YEH (DANIEL), DEATON PAUL, OUYE ALAN H
Format: Patent
Sprache:eng
Schlagworte:
MIXING, e.g. DISSOLVING, EMULSIFYING, DISPERSING
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
TRANSPORTING
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Beschreibung
Zusammenfassung:A method and apparatus for providing a precursor to a process chamber is described. The apparatus comprises an ampoule capable of receiving either a liquid precursor source material or a solid precursor source material. The ampoule is capable of delivering either a liquid precursor material to a vaporizer coupled to the process chamber, or a vaporized or gaseous precursor material to the process chamber. The ampoule also includes a continuous level sensor to accurately monitor the level of precursor source material within the ampoule.