System and method for two-dimensional beam scan across a workpiece of an ion implanter

A workpiece or semiconductor wafer is tilted as a ribbon beam is swept up and/or down the workpiece. In so doing, the implant angle or the angle of the ion beam relative to the workpiece remains substantially constant across the wafer. This allows devices to be formed substantially consistently on t...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: GRAF MICHAEL A, FERRARA JOSEPH, VANDERBERG BO H
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A workpiece or semiconductor wafer is tilted as a ribbon beam is swept up and/or down the workpiece. In so doing, the implant angle or the angle of the ion beam relative to the workpiece remains substantially constant across the wafer. This allows devices to be formed substantially consistently on the wafer. Resolving plates move with the beam as the beam is scanned up and/or down. This allows desired ions to impinge on the wafer, but blocks undesirable contaminants.