Method of scanning
A method of scanning is disclosed comprising, providing a scanning system (10) having a sample holder (14) and a relatively movable scanning device (18), performing a scan of at least a part of an object (22) located on the sample holder (14), establishing orientation of the sample holder and interp...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | A method of scanning is disclosed comprising, providing a scanning system (10) having a sample holder (14) and a relatively movable scanning device (18), performing a scan of at least a part of an object (22) located on the sample holder (14), establishing orientation of the sample holder and interpreting data from a scan using the orientation whereby, the orientation is established using data from the scan of the surface of the sample holder. The orientation may be established by defining a plane (56b) of the sample holder, which may be limited by boundaries (76a, 76b). |
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