Heat sink formed of multiple metal layers on backside of integrated circuit die

An integrated circuit die includes a substrate having a front surface and a back surface, wherein the substrate front surface has electrical circuits formed thereon, and the substrate back surface has a plurality of metal layers formed thereon. The plurality of metal layers comprises at least one la...

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Bibliographische Detailangaben
Hauptverfasser: RYAN VIVIAN, SHANAMAN, III RICHARD HANDLY
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:An integrated circuit die includes a substrate having a front surface and a back surface, wherein the substrate front surface has electrical circuits formed thereon, and the substrate back surface has a plurality of metal layers formed thereon. The plurality of metal layers comprises at least one layer having a thickness of greater than about ten micrometers. The outermost metal layer may be mechanically and thermally bonded to a package using a die attach layer comprising a thermally conductive reflowable material. The invention advantageously facilitates the dissipation of heat from the integrated circuit die.