Method for fabricating a semiconductor component and semiconductor component
In a method for fabricating a semiconductor component, a semiconductor substrate comprising a first surface is provided and a shaping matrix is applied to the first surface. The shaping matrix comprises at least one continuous depression arranged in such a way that contact regions in a region of the...
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Sprache: | eng |
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Zusammenfassung: | In a method for fabricating a semiconductor component, a semiconductor substrate comprising a first surface is provided and a shaping matrix is applied to the first surface. The shaping matrix comprises at least one continuous depression arranged in such a way that contact regions in a region of the first surface are at least partly uncovered. A sacrificial layer is applied to sidewalls of the continuous depression in an upper section of the depression, a first electrode is produced by applying a first conductive layer in a lower section of the depression and to the sacrificial layer, and the sacrificial layer is removed in order to uncover the sidewalls of the shaping matrix in the upper section. A dielectric layer is applied to the first conductive layer and a second electrode is formed by applying a second conductive layer to the dielectric layer. |
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