Dual technology optical profilometer

The device comprises a light source (LED), beam splitters, illumination pattern generating mechanism and interchangeable microscope lenses that are lenses that may be used to obtain confocal images and lenses that may be used to obtain interferometric images. The generating mechanism can generate a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LAGUARTA BERTRAN FERRAN, CADEVALL ARTIGUES CRISTINA, ARTIGAS PURSALS ROGER
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:The device comprises a light source (LED), beam splitters, illumination pattern generating mechanism and interchangeable microscope lenses that are lenses that may be used to obtain confocal images and lenses that may be used to obtain interferometric images. The generating mechanism can generate a sequence of illumination patterns to obtain confocal images, or total opening of all the illumination pixels to obtain interferometric images.