Bulk acoustic wave resonator and filter
A bulk acoustic wave resonator includes an acoustically active area where an acoustic wave is excitable, and a transition area adjacent to an outside edge of the acoustically active area. A critical frequency of the acoustic wave in the transition area differs from a critical frequency of the acoust...
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Zusammenfassung: | A bulk acoustic wave resonator includes an acoustically active area where an acoustic wave is excitable, and a transition area adjacent to an outside edge of the acoustically active area. A critical frequency of the acoustic wave in the transition area differs from a critical frequency of the acoustic wave in the active area. The transition area includes an additional layer. The bulk acoustic wave resonator includes electrodes for electrically connecting to electrical supply lines. The additional layer is irregular in areas adjacent to junction areas between the electrical supply lines and the resonator. |
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