Photonic structures, devices, and methods

Photonic crystal structures are made by a method including steps of providing a substrate, depositing at least one planar layer to form a stack, each planar layer of the stack comprising two or more sublayers having different sublayer refractive indices, depositing a hard mask material, depositing a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: STASIAK JAMES, CRUZ-URIBE TONY S, PETERS KEVIN, COULMAN DONALD J, CHAMPION DAVID
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:Photonic crystal structures are made by a method including steps of providing a substrate, depositing at least one planar layer to form a stack, each planar layer of the stack comprising two or more sublayers having different sublayer refractive indices, depositing a hard mask material, depositing an imprintable material over the hard mask material, patterning the imprintable material by imprinting an array of depressions, and directionally etching at the depressions a regular array of openings through the hard mask material and the stack.