Methods and apparatus for inline variability measurement of integrated circuit components

An integrated circuit device is provided including at least one first array configuration of integrated circuit components comprising a mxn array of FETs, without specified internal connections between the integrated circuit components, wherein m is greater than two. The integrated circuit device further includes at least one second array configuration of integrated circuit components comprising an array of integrated circuit components nominally identical to those of the first array configuration, with specified internal connections between integrated circuit components. A variation coefficient is determined for the integrated circuit components based on a measured specified parameter of the first array configuration and the second array configuration.