Probe holder for a probe for testing semiconductor components

A probe holder in which the probe needle has a slight horizontal offset under the action of a vertical force, includes a probe holder for a probe needle, wherein the holder is adapted, for fastening and electrical contact-connection, on a carrier device of a test apparatus and has a holder arm havin...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KANEV STOJAN, KIESEWETTER JORG, KREISSIG STEFAN
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A probe holder in which the probe needle has a slight horizontal offset under the action of a vertical force, includes a probe holder for a probe needle, wherein the holder is adapted, for fastening and electrical contact-connection, on a carrier device of a test apparatus and has a holder arm having a needle holder at the free end thereof to fasten the probe needle, and a fastening arm for connecting the probe holder to the carrier device. The holder arm and the fastening arm are connected to one another by an articulated joint, whereby horizontal offset of the needle tip on account of external forces can be reduced or even prevented by increasing the radius of the yielding movement of the probe needle.