Probe receptacle for mounting a probe for testing semiconductor components, probe holder arm and test apparatus

To arrange a probe needle in a reproducible manner, ensure reliable contact-connection of the probe needle and ensure that the probe needle is held securely even at high temperatures or test forces, a probe receptacle is provided for mounting a probe for testing semiconductor components. The probe h...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KANEV STOJAN, FLEISCHER HANS-JURGEN, SCHMIDT AXEL, BECKER AXEL
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:To arrange a probe needle in a reproducible manner, ensure reliable contact-connection of the probe needle and ensure that the probe needle is held securely even at high temperatures or test forces, a probe receptacle is provided for mounting a probe for testing semiconductor components. The probe has a probe needle and an essentially prismatic probe shaft. The probe receptacle comprises a base having a socket opening to receive the prismatic probe shaft, surrounded by a base wall. The base wall comprises at least two base wall segments which can be moved toward one another. A probe holder arm having such a probe receptacle, and test apparatus having at least one probe which has such a probe receptacle are also provided.