Sensor and system for sensing an electron beam

The present invention refers to a sensor (10) for sensing an intensity of an electron beam generated by an electron beam generator along a path, the electron beam being exited from the generator through an exit window (24). The invention is characterized in that the sensor (10) comprises a conductor...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KRISTIANSSON ANDERS, NAESLUND LARS AAKE, HALLSTADIUS HANS
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The present invention refers to a sensor (10) for sensing an intensity of an electron beam generated by an electron beam generator along a path, the electron beam being exited from the generator through an exit window (24). The invention is characterized in that the sensor (10) comprises a conductor (26) located within the path and exposed to the exit window (24), and an insulating housing (28) for shielding the conductor (26), said housing (28) being engaged with the exit window (24) forming a chamber (30) with said exit window (24), and that the conductor (26) is positioned within said chamber (30). The invention also refers to a system for sensing an intensity of an electron beam.