Ion sources and methods for generating an ion beam with a controllable ion current density distribution

Ion sources and methods for generating an ion beam with a controllable ion current density distribution

Ion sources and methods for generating an ion beam with a controllable ion current density distribution. The ion source includes a discharge chamber and an electromagnet adapted to generate a magnetic field for changing a density distribution of the plasma inside the discharge chamber and, thereby,...

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Bibliographische Detailangaben
Hauptverfasser: DRUZ BORIS L, HAYES ALAN V, YEVTUKHOV RUSTAM, KANAROV VIKTOR
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Beschreibung
Zusammenfassung:Ion sources and methods for generating an ion beam with a controllable ion current density distribution. The ion source includes a discharge chamber and an electromagnet adapted to generate a magnetic field for changing a density distribution of the plasma inside the discharge chamber and, thereby, to change the ion current density distribution.