Strain gauge

A strain gauge (10), comprising a silicon strain sensing element (14) for sensing strain with first and second load points (16) and provided with a pair of piezo-resistors (22) located between said load points such that, when said strain sensing element (14) is subjected to tension or compression at...

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Bibliographische Detailangaben
Hauptverfasser:	POWLESLAND IAN, WILSON ALAN
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ANGLES MEASURING AREAS MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	A strain gauge (10), comprising a silicon strain sensing element (14) for sensing strain with first and second load points (16) and provided with a pair of piezo-resistors (22) located between said load points such that, when said strain sensing element (14) is subjected to tension or compression at said load points, a first of said pair of piezo-resistors (22a, 22b) is subjected to compression and a second of said pair of piezo-resistors (22a, 22b) is subjected to tension, wherein a change in relative resistance of said pair of piezo-resistors is induced by subjecting said strain sensing element to compression or tension.