Semiconductor apparatus and manufacturing method

Pb free solder is used in die bonding. A thermal stress reduction plate is disposed between a semiconductor chip and a die pad made of a Cu alloy. The semiconductor chip and the thermal stress reduction plate are joined and the thermal stress reduction plate and the die pad are joined by a joint mat...

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Bibliographische Detailangaben
Hauptverfasser: NAKAMURA HIROYUKI, KAJIWARA RYOUICHI, OKA HIROI, KAGII HIDEMASA, ITOU KAZUTOSHI
Format: Patent
Sprache:eng
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Zusammenfassung:Pb free solder is used in die bonding. A thermal stress reduction plate is disposed between a semiconductor chip and a die pad made of a Cu alloy. The semiconductor chip and the thermal stress reduction plate are joined and the thermal stress reduction plate and the die pad are joined by a joint material of Pb free solder having Sn-Sb-Ag-Cu as its main constituent elements and having a solidus temperature not lower than 270° C. and a liquidus temperature not higher than 400° C. Thus, die bonding can be performed using the Pb free solder without generating any chip crack.