Electromagnetic micro-generator and method for manufacturing the same

Electromagnetic micro-generator and method for manufacturing the same

A micro-generator includes an integrated circuit (IC) wafer. A micro-electro mechanical system (MEMS) wafer, with a movable micromechanical element, is bonded to the IC wafer. A plurality of first metal coils associated with a plurality of trenches is arranged in one of the IC wafer and the MEMS waf...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: KVISTEROY TERJE
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
DYNAMO-ELECTRIC MACHINES
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
GENERATION
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A micro-generator includes an integrated circuit (IC) wafer. A micro-electro mechanical system (MEMS) wafer, with a movable micromechanical element, is bonded to the IC wafer. A plurality of first metal coils associated with a plurality of trenches is arranged in one of the IC wafer and the MEMS wafer. A plurality of micro-magnets is provided in the other of the IC wafer and the MEMS wafer. Each micro-magnet is associated with a respective trench and is formed from a magnet layer deposited, plated or bonded to the MEMS wafer or IC wafer. Movement of the micro-mechanical element generates a voltage in the first metal coils.