Lithographic support structure

The present invention relates to a lithographic projection apparatus with a supporting structure to support and move an object, like a substrate. The supporting structure may be a robot having a robotic arm with a support frame for supporting, e.g. the substrate. The support frame includes a clampin...

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Bibliographische Detailangaben
Hauptverfasser:	VAN DEN BERG JOHANNES CHARLES ADRIANUS, VAN DE SANDE HENRICUS JOHANNES ADRIANUS, VAN MEER ASCHWIN LODEWIJK HENDRICUS JOHANNES, SMULDERS PATRICK JOHANNES CORNELUS HENDRIK, VAN ELP JAN, SPANJERS FRANCISCUS ANDREAS CORNELIS JOHANNES, VERMEULEN JOHANNES PETRUS MARTINUS BERNARDUS, VERVOORT THIJS, TEGENBOSCH HENRICUS GERARDUS, BUIS EDWIN JOHAN, TINNEMANS PATRICIUS ALOYSIUS JACOBUS, HOOGKAMP JAN FREDERIK, DONDERS SJOERD NICOLAAS LAMBERTUS, VISSER RAIMOND
Format:	Patent
Sprache:	eng
Schlagworte:	ACCESSORIES THEREFOR APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USINGWAVES OTHER THAN OPTICAL WAVES APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FORPROJECTING OR VIEWING THEM APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CHAMBERS PROVIDED WITH MANIPULATION DEVICES CINEMATOGRAPHY CLEANING CLEANING IN GENERAL CONVERSION OR DISTRIBUTION OF ELECTRIC POWER CONVEYING ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY GENERATION HAND TOOLS HANDLING THIN OR FILAMENTARY MATERIAL HOLOGRAPHY MANIPULATORS MATERIALS THEREFOR ORIGINALS THEREFOR PACKING PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS PNEUMATIC TUBE CONVEYORS PORTABLE POWER-DRIVEN TOOLS PREVENTION OF FOULING IN GENERAL SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	The present invention relates to a lithographic projection apparatus with a supporting structure to support and move an object, like a substrate. The supporting structure may be a robot having a robotic arm with a support frame for supporting, e.g. the substrate. The support frame includes a clamping structure having one or more clamps for holding the substrate during movement. The robot arm comprises one or more compliant parts. The clamp may be a Johnson-Raybeck effect type clamp with an oxidized upper surface. For better de-clamping, a RF AC decaying de-clamping voltage may be provided to the clamp. The apparatus may be cleaned with one single substrate only.