Methods and apparatus for enhancing electronic device manufacturing throughput
Methods, systems, and apparatus are provided that include determining a number of storage locations corresponding to busy chambers of an electronic device manufacturing tool; based on the number of storage locations corresponding to busy chambers, determining whether the electronic device manufactur...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | Methods, systems, and apparatus are provided that include determining a number of storage locations corresponding to busy chambers of an electronic device manufacturing tool; based on the number of storage locations corresponding to busy chambers, determining whether the electronic device manufacturing tool may accommodate a substrate; and of the electronic device manufacturing tool may accommodate a substrate, receiving a substrate in the electronic device manufacturing tool. Numerous other aspects are provided. |
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