Method for controlling stage apparatus

At least one exemplary embodiment is directed to a control method for controlling a stage apparatus including a base and a stage, the base including first and second coil phases, the stage including a plurality of magnets. The control method includes a first energization step of rotating the stage t...

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Bibliographische Detailangaben
1. Verfasser:	MIYAKAWA TAKAHIRO
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORSOR DYNAMO-ELECTRIC CONVERTERS CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS CONVERSION OR DISTRIBUTION OF ELECTRIC POWER ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY GENERATION HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	At least one exemplary embodiment is directed to a control method for controlling a stage apparatus including a base and a stage, the base including first and second coil phases, the stage including a plurality of magnets. The control method includes a first energization step of rotating the stage to a stable angle by contemporaneously energizing a plurality of coils comprising the first coil phase and a second energization step of rotating the stage to a stable angle by sequentially energizing coils comprising the second coil phase one by one.