Apparatus and method for electrostatically depositing aerosol particles

An apparatus useful for electrostatic deposition (ESD) of aerosol particles and methods of depositing the aerosol particles onto a substrate are disclosed. The ESD apparatus and the method of the present invention are useful for electrostatically depositing nanoparticles produced by gas-phase synthe...

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Bibliographische Detailangaben
Hauptverfasser: FEKETY CURTIS ROBERT, OSTERHOUT CLINTON DAMON, FILIPPOV ANDREY V, SALA MARTIN ANDREW, TRUESDALE CARLTON MAURICE, COFFEY CALVIN THOMAS
Format: Patent
Sprache:eng
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Zusammenfassung:An apparatus useful for electrostatic deposition (ESD) of aerosol particles and methods of depositing the aerosol particles onto a substrate are disclosed. The ESD apparatus and the method of the present invention are useful for electrostatically depositing nanoparticles produced by gas-phase synthesis onto a substrate where the velocity of the flow of aerosol can be controlled.